3

Self-consistent particle simulation of radio frequency SF6 discharges: Role of ion recombination

Year:
2006
Language:
english
File:
PDF, 183 KB
english, 2006
9

Model for charge exchanges in on and on collisions

Year:
2007
Language:
english
File:
PDF, 165 KB
english, 2007
43

Collision Models between F - ion and Ar, Kr, and Xe Atoms

Year:
2005
Language:
english
File:
PDF, 248 KB
english, 2005
47

Particle modeling of radiofrequency discharges of SF$_6$

Year:
2006
Language:
english
File:
PDF, 121 KB
english, 2006